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Wei Xiu zhu
WhatsApp:+852 5796 0986
Wechat:13395077993
Zhejiang Yiwu Beixun Automation Technology Co., Ltd
China (Zhejiang) Pilot Free Trade Zone, No. 2 Chunpai Road, Beiyuan Street, Yiwu City, Jinhua City, 7F 7059
Website：www.bxplc2.com
Email:3076784238@qq.com

 

AMAT 0190-76050 RF Match Network Assembly

Part Number: 0190-76050 | Applied Materials RF Subsystem Component

Product Overview

The AMAT 0190-76050 is a high-performance RF Match Network Assembly designed for Applied Materials’ semiconductor manufacturing equipment. This critical component provides precise impedance matching for radio frequency (RF) power delivery in plasma processing systems, ensuring optimal energy transfer and process stability in wafer fabrication applications.

Engineered to meet the stringent requirements of semiconductor production environments, this assembly delivers consistent performance under high-vacuum and high-temperature conditions, contributing to improved process yields and equipment uptime.

AMAT 0190-76050 RF Match Network Assembly Applied Materials RF Subsystem Component

AMAT 0190-76050 RF Match Network Assembly

Key Specifications

  • Frequency Range: 13.56 MHz (standard), 2 MHz – 60 MHz (configurable)
  • Power Handling: Up to 3000 W continuous wave (CW)
  • Impedance Matching Range: 5 – 500 Ω
  • Operating Voltage: 24 VDC ±5%
  • Control Interface: RS-485, Ethernet IP
  • Operating Temperature: 10°C to 50°C
  • Vacuum Compatibility: 1×10⁻⁹ Torr (ultra-high vacuum rated)
  • Dimensions: 280mm × 180mm × 120mm (L×W×H)
  • Weight: 8.5 kg
  • Certifications: CE, UL, SEMI S2/S8 Compliant

Main Features

Precision Impedance Matching

Advanced tuning algorithm ensures rapid and accurate impedance matching for stable plasma conditions.

High Power Efficiency

Low insertion loss (<0.5 dB) maximizes RF power transfer efficiency and reduces energy consumption.

Real-time Monitoring

Integrated sensors provide continuous monitoring of voltage, current, and temperature for predictive maintenance.

Vacuum-rated Construction

Hermetically sealed components and ultra-high vacuum (UHV) compatible materials for semiconductor processing.

Typical Applications

The AMAT 0190-76050 RF Match Network Assembly is specifically designed for use in Applied Materials semiconductor processing tools: