Manufacturer:KLA Corporation
Model:KLA 5105
Type:Advanced Inspection Module
Application:Semiconductor Wafer Inspection
Detection Capability:Sub-50nm Defects
Resolution:High Resolution Imaging
Software:Integrated Inspection Software Suite
Inspection Rate:Up to 200 wafers per hour
Dimensions:Width: 60cm, Height: 120cm, Depth: 80cm
Weight:Approximately 500kg
Power Requirements:220V AC, 50/60Hz
Operating Environment:Temperature: 18°C to 25°C, Humidity: 20% to 80%
The KLA 5105 Precision Measurement Module is an indispensable tool for advanced metrology applications in semiconductor and microelectronics manufacturing. Its sub-nanometer resolution and high accuracy make it ideal for precise measurements critical for process control.
Designed for reliability and durability, the KLA 5105 operates efficiently across a wide temperature range, from -20°C to +60°C, ensuring consistent performance in various environments.
This module integrates seamlessly with existing systems through its versatile power supply options, supporting both 100V and 240V AC inputs at 50 or 60Hz frequencies.
With dimensions of 25cm x 30cm x 15cm and weighing just 5kg, the KLA 5105 is compact yet robust, making it easy to integrate into production lines without compromising on performance or space.
Enhanced by user-friendly interfaces and detailed documentation, the KLA 5105 simplifies setup and operation, allowing technicians and engineers to achieve optimal results quickly and efficiently.
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