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MKS Instruments 626A01TDE – High Precision Vacuum Gauge Module

The MKS Instruments 626A01TDE Vacuum Gauge is a highly precise, compact vacuum measurement solution designed for industrial applications requiring accurate pressure readings within the range of 133.32 Pa.

Measurement Range:133.32 Pa

Accuracy:+/- 0.5% F.S.

Response Time:≤ 5 seconds

Power Consumption:≤ 5 mA

Operating Temperature:-10°C to +60°C

Storage Temperature:-20°C to +85°C

Display Type:Digital LCD

Connection Type:Standard M12 connector

Size:70mm x 44mm x 26mm

    The MKS Instruments 626A01TDE vacuum gauge module is engineered for industries where precision and reliability are paramount. It features an advanced sensor that ensures accurate readings across its wide operating range, making it suitable for various applications including semiconductor fabrication, analytical chemistry, and environmental monitoring.

    With its quick response time and low power consumption, this module is energy-efficient and responsive, capable of adapting to rapid changes in pressure conditions without compromising on accuracy.

    Crafted from corrosion-resistant stainless steel, the module is built to withstand harsh environments, ensuring longevity and maintenance-free operation over extended periods.

    Equipped with both RS232 and RS485 connectivity options, it offers flexibility in integration with different systems, facilitating seamless data transfer and compatibility with existing infrastructure.

    Operational within a broad temperature range (-40°C to +70°C), the MKS Instruments 626A01TDE vacuum gauge module is versatile enough for both laboratory settings and field applications. Its compact design (150mm x 76mm x 32mm) and lightweight (approximately 0.2 kg) make it easy to install and integrate into existing systems.

MKS 626A01TDE RANGE 133.32Pa




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