Operating Range:1 sccm to 10 slpm
Accuracy:±0.5% of reading + 0.1% of full scale
Repeatability:±0.2%
Response Time:≤ 1 second
Operating Pressure:Up to 100 psig
Materials:Stainless Steel, Aluminum
Temperature Range:-20°C to 60°C
Electrical Interface:RS-232, RS-485, Modbus RTU
Designed for precise and reliable gas flow management, the MKS MC20A series ensures consistent performance across a wide range of industrial applications.
Our advanced mass flow controllers feature a robust design built with high-quality materials including stainless steel and PTFE, ensuring durability and resistance to corrosion.
The MC20A series offers digital control capabilities through RS-232/485 interfaces, providing easy integration into existing systems and enabling remote monitoring and control.
With a broad flow range and high accuracy and repeatability, these controllers are perfect for semiconductor manufacturing, chemical processing plants, and research laboratories.
Installation is straightforward, and maintenance is minimal thanks to our innovative design and use of long-lasting components.
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