AMAT 0021-84842
Part No.: 0021-84842
Manufacturer: AMAT (Applied Materials)
Part Type: Mechanical Bracket / Mounting Assembly
Industry: Semiconductor Wafer Fabrication
Application: Etch / CVD / PVD Process Chamber
Specification: UHV Ultra-High Vacuum Grade
1. General Description
AMAT 0021-84842 is an original precision mechanical bracket and mounting assembly manufactured by Applied Materials. It is specially designed for ultra-high vacuum process chambers of semiconductor wafer fabrication equipment, widely used in Etch, CVD and PVD process tools. Adopted with high-purity alloy material, it features low outgassing, plasma corrosion resistance and high dimensional accuracy, used for fixing and positioning sensors, pipelines and internal modules inside vacuum chambers.
2. Key Features
• Designed for semiconductor UHV vacuum chamber environment
• Low outgassing and low particle emission performance
• High precision machining with strict mounting tolerance
• Resistant to high temperature and plasma corrosion
• Direct OEM replacement for AMAT process equipment
• Compliant with high cleanliness Fab process requirements
3. Typical Applications
• Internal structural mounting for semiconductor Etch chamber
• Fixing parts of PVD / CVD thin film deposition equipment
• Mounting bracket for vacuum pipeline and process sensors
• Maintenance and spare part replacement in semiconductor Fab
AMAT © 0021-84842 Semiconductor Mechanical Spare Part
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